Design of a full-filed transmission X-ray microscope with 30nm resolution

Fuente: arXiv
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Auteurs principaux: Liao, Keliang, He, Qili, Li, Panyun, Song, Maohua, Zhu, Peiping
Format: Preprint
Publié: 2023
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author Liao, Keliang
He, Qili
Li, Panyun
Song, Maohua
Zhu, Peiping
author_facet Liao, Keliang
He, Qili
Li, Panyun
Song, Maohua
Zhu, Peiping
contents A full-field transmission hard X-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXM was introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.
format Preprint
id arxiv_https___arxiv_org_abs_2401_01006
institution arXiv
publishDate 2023
record_format arxiv
spellingShingle Design of a full-filed transmission X-ray microscope with 30nm resolution
Liao, Keliang
He, Qili
Li, Panyun
Song, Maohua
Zhu, Peiping
Instrumentation and Detectors
Optics
A full-field transmission hard X-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXM was introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.
title Design of a full-filed transmission X-ray microscope with 30nm resolution
topic Instrumentation and Detectors
Optics
url https://arxiv.org/abs/2401.01006