Etching of elemental layers in oxide molecular beam epitaxy by O2-assisted formation and evaporation of their volatile suboxide: The examples of Ga and Ge

Fuente: arXiv

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Bibliographic Details
Main Authors:	Chen, Wenshan, Egbo, Kingsley, Zhang, Huaide, Ardenghi, Andrea, Bierwagen, Oliver
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2401.07374