Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide
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arXiv
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| Main Authors: | , , , , , , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2024
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| _version_ | 1866914651308032000 |
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| author | Wang, Wei Hübner, Uwe Chen, Tao Gärtner, Anne Köbel, Joseph Jahn, Franka Schneidwind, Henrik Dellith, Andrea Dellith, Jan Wieduwilt, Torsten Zeisberger, Matthias Shaik, Tanveer Ahmed Bingel, Astrid Schmidt, Markus A Huang, Jer-Shing Deckert, Volker |
| author_facet | Wang, Wei Hübner, Uwe Chen, Tao Gärtner, Anne Köbel, Joseph Jahn, Franka Schneidwind, Henrik Dellith, Andrea Dellith, Jan Wieduwilt, Torsten Zeisberger, Matthias Shaik, Tanveer Ahmed Bingel, Astrid Schmidt, Markus A Huang, Jer-Shing Deckert, Volker |
| contents | The rise of micro/nanooptics and lab-on-chip devices demands the fabrication of three-dimensional structures with decent resolution. Here, we demonstrate the combination of grayscale electron beam lithography and direct forming methodology to fabricate antimony sulfide structures with free form for the first time. The refractive index of the electron beam patterned structure was calculated based on an optimization algorithm that is combined with genetic algorithm and transfer matrix method. By adopting electron irradiation with variable doses, 4-level Fresnel Zone Plates and metalens were produced and characterized. This method can be used for the fabrication of three-dimensional diffractive optical elements and metasurfaces in a single step manner. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2401_13427 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide Wang, Wei Hübner, Uwe Chen, Tao Gärtner, Anne Köbel, Joseph Jahn, Franka Schneidwind, Henrik Dellith, Andrea Dellith, Jan Wieduwilt, Torsten Zeisberger, Matthias Shaik, Tanveer Ahmed Bingel, Astrid Schmidt, Markus A Huang, Jer-Shing Deckert, Volker Optics Materials Science The rise of micro/nanooptics and lab-on-chip devices demands the fabrication of three-dimensional structures with decent resolution. Here, we demonstrate the combination of grayscale electron beam lithography and direct forming methodology to fabricate antimony sulfide structures with free form for the first time. The refractive index of the electron beam patterned structure was calculated based on an optimization algorithm that is combined with genetic algorithm and transfer matrix method. By adopting electron irradiation with variable doses, 4-level Fresnel Zone Plates and metalens were produced and characterized. This method can be used for the fabrication of three-dimensional diffractive optical elements and metasurfaces in a single step manner. |
| title | Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide |
| topic | Optics Materials Science |
| url | https://arxiv.org/abs/2401.13427 |