Optimization of scandium oxide growth by high pressure sputtering on silicon

Fuente: arXiv

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Bibliographic Details
Main Authors:	Feijoo, Pedro Carlos, Pampillón, María Ángela, Andrés, Enrique San, Lucía, María Luisa
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2401.16489