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High Pressure Sputtering For Kigh-k Dielectric Deposition. Is It Worth Trying?

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Andrés, Enrique San, Feijoo, Pedro Carlos, Pampillón, María Ángela, Lucía, María Luisa, del Prado, Álvaro
Formato:	Preprint
Publicado:	2024
Materias:	Applied Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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