High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Pampillón, María Ángela, Andrés, Enrique San, Feijoo, Pedro Carlos, Fierro, José Luis G.
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2401.17332