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Scavenging effect on plasma oxidized Gd$_2$O$_3$ grown by high pressure sputtering on Si and InP substrates

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Bibliographic Details
Main Authors:	Pampillón, María Ángela, Feijoo, Pedro Carlos, Andrés, Enrique San, García, Héctor, Castán, Helena, Dueñas, Salvador
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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