Gadolinium scandate by high-pressure sputtering for future generations of high-k dielectrics

Fuente: arXiv

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Bibliographic Details
Main Authors:	Feijoo, Pedro Carlos, Pampillón, María Ángela, Andrés, Enrique San, Fierro, José Luis G.
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2402.00887