Wideband, Efficient AlScN-Si Acousto-Optic Modulator in a Commercially Available Silicon Photonics Process
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arXiv
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| Auteurs principaux: | , , , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866917581181419520 |
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| author | Erdil, Mertcan Izhar Deng, Yang Tang, Zichen Idjadi, Mohamad Hossein Ashtiani, Farshid Aflatouni, Firooz Olsson III, Roy |
| author_facet | Erdil, Mertcan Izhar Deng, Yang Tang, Zichen Idjadi, Mohamad Hossein Ashtiani, Farshid Aflatouni, Firooz Olsson III, Roy |
| contents | Acousto-optic integration offers numerous applications including low-loss microwave signal processing, nonreciprocal light propagation, frequency comb generation, and broadband acousto-optic modulation. State-of-the-art acousto-optic systems are mainly implemented entirely using in-house fabrication processes, which despite excellent performance typically suffer from low yield and are not compatible with mass production through foundry processes. Here, we demonstrate a highly efficient wideband acousto-optic modulator (AOM) implemented on a silicon photonics foundry process enabling high-yield low-cost mass production of AOMs with other photonic and electronic devices on the same substrate. In the reported structure, a 150 $μ$m long AlScN-based acoustic transducer launches surface acoustic waves (SAW), which modulate the light passing through a silicon optical waveguide. A modulation efficiency of -18.3 dB over a bandwidth of 112 MHz is achieved, which to our knowledge is the highest reported efficiency and bandwidth combination among silicon based AOMs, resulting in about an order of magnitude $BW(V_πL)^{-1}$ figure-of-merit improvement compared to the state-of-the-art CMOS compatible AOMs. The monolithically integrated acousto-optic platform developed in this work will pave the way for low-cost, miniature microwave filters, true time delays, frequency combs, and other signal processors with the advanced functionality offered by foundry-integrated photonic circuits. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2402_01127 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Wideband, Efficient AlScN-Si Acousto-Optic Modulator in a Commercially Available Silicon Photonics Process Erdil, Mertcan Izhar Deng, Yang Tang, Zichen Idjadi, Mohamad Hossein Ashtiani, Farshid Aflatouni, Firooz Olsson III, Roy Optics Applied Physics Acousto-optic integration offers numerous applications including low-loss microwave signal processing, nonreciprocal light propagation, frequency comb generation, and broadband acousto-optic modulation. State-of-the-art acousto-optic systems are mainly implemented entirely using in-house fabrication processes, which despite excellent performance typically suffer from low yield and are not compatible with mass production through foundry processes. Here, we demonstrate a highly efficient wideband acousto-optic modulator (AOM) implemented on a silicon photonics foundry process enabling high-yield low-cost mass production of AOMs with other photonic and electronic devices on the same substrate. In the reported structure, a 150 $μ$m long AlScN-based acoustic transducer launches surface acoustic waves (SAW), which modulate the light passing through a silicon optical waveguide. A modulation efficiency of -18.3 dB over a bandwidth of 112 MHz is achieved, which to our knowledge is the highest reported efficiency and bandwidth combination among silicon based AOMs, resulting in about an order of magnitude $BW(V_πL)^{-1}$ figure-of-merit improvement compared to the state-of-the-art CMOS compatible AOMs. The monolithically integrated acousto-optic platform developed in this work will pave the way for low-cost, miniature microwave filters, true time delays, frequency combs, and other signal processors with the advanced functionality offered by foundry-integrated photonic circuits. |
| title | Wideband, Efficient AlScN-Si Acousto-Optic Modulator in a Commercially Available Silicon Photonics Process |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2402.01127 |