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Amorphous Boron Nitride as an Ultrathin Copper Diffusion Barrier for Advanced Interconnects

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Kaya, Onurcan, Kim, Hyeongjoon, Kim, Byeongkyu, Galvani, Thomas, Colombo, Luigi, Lanza, Mario, Shin, Hyeon-Jin, Cole, Ivan, Shin, Hyeon Suk, Roche, Stephan
Format:	Preprint
Publié:	2024
Sujets:	Materials Science
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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