Transfer-printed multiple Ge$_{0.89}$Sn$_{0.11}$ membrane mid-infrared photodetectors

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Hauptverfasser: Lemieux-Leduc, Cédric, Atalla, Mahmoud R. M., Assali, Simone, Koelling, Sebastian, Daoust, Patrick, Luo, Lu, Daligou, Gérard, Brodeur, Julien, Kéna-Cohen, Stéphane, Peter, Yves-Alain, Moutanabbir, Oussama
Format: Preprint
Veröffentlicht: 2024
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author Lemieux-Leduc, Cédric
Atalla, Mahmoud R. M.
Assali, Simone
Koelling, Sebastian
Daoust, Patrick
Luo, Lu
Daligou, Gérard
Brodeur, Julien
Kéna-Cohen, Stéphane
Peter, Yves-Alain
Moutanabbir, Oussama
author_facet Lemieux-Leduc, Cédric
Atalla, Mahmoud R. M.
Assali, Simone
Koelling, Sebastian
Daoust, Patrick
Luo, Lu
Daligou, Gérard
Brodeur, Julien
Kéna-Cohen, Stéphane
Peter, Yves-Alain
Moutanabbir, Oussama
contents Due to their narrow band gap and compatibility with silicon processing, germanium-tin (Ge$_{1-x}$Sn$_x$) alloys are a versatile platform for scalable integrated mid-infrared photonics. These semiconductors are typically grown on silicon wafers using Ge as an interlayer. However, the large lattice mismatch in this heteroepitaxy protocol leads to the build-up of compressive strain in the grown layers. This compressive strain limits the material quality and its thermal stability besides expanding the band gap, thereby increasing the Sn content needed to cover a broader range in the mid-infrared. Released Ge$_{1-x}$Sn$_x$ membranes provide an effective way to mitigate these harmful effects of the epitaxial strain and control the band gap energy while enabling the hybrid integration onto different substrates. With this perspective, herein strain-relaxed Ge$_{0.89}$Sn$_{0.11}$ membranes are fabricated and subsequently transfer-printed with metal contacts to create multiple photodetectors in a single transfer step. The resulting photodetectors exhibit an extended photodetection cutoff reaching a wavelength of $3.1 \,μ$m, coupled with a significant reduction in the dark current of two orders of magnitude as compared to as-grown photoconductive devices. The latter yields a reduced cutoff of $2.8 \,μ$m due to the inherent compressive strain. Furthermore, the impact of chemical treatment and annealing on the device performance was also investigated showing a further reduction in the dark current. The demonstrated transfer printing, along with the use of an adhesive layer, would allow the transfer of multiple GeSn membranes onto virtually any substrate. This approach paves the way for scalable fabrication of hybrid optoelectronic devices leveraging the tunable band gap of Ge$_{1-x}$Sn$_x$ in the mid-wave infrared range.
format Preprint
id arxiv_https___arxiv_org_abs_2402_03462
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Transfer-printed multiple Ge$_{0.89}$Sn$_{0.11}$ membrane mid-infrared photodetectors
Lemieux-Leduc, Cédric
Atalla, Mahmoud R. M.
Assali, Simone
Koelling, Sebastian
Daoust, Patrick
Luo, Lu
Daligou, Gérard
Brodeur, Julien
Kéna-Cohen, Stéphane
Peter, Yves-Alain
Moutanabbir, Oussama
Applied Physics
Optics
Due to their narrow band gap and compatibility with silicon processing, germanium-tin (Ge$_{1-x}$Sn$_x$) alloys are a versatile platform for scalable integrated mid-infrared photonics. These semiconductors are typically grown on silicon wafers using Ge as an interlayer. However, the large lattice mismatch in this heteroepitaxy protocol leads to the build-up of compressive strain in the grown layers. This compressive strain limits the material quality and its thermal stability besides expanding the band gap, thereby increasing the Sn content needed to cover a broader range in the mid-infrared. Released Ge$_{1-x}$Sn$_x$ membranes provide an effective way to mitigate these harmful effects of the epitaxial strain and control the band gap energy while enabling the hybrid integration onto different substrates. With this perspective, herein strain-relaxed Ge$_{0.89}$Sn$_{0.11}$ membranes are fabricated and subsequently transfer-printed with metal contacts to create multiple photodetectors in a single transfer step. The resulting photodetectors exhibit an extended photodetection cutoff reaching a wavelength of $3.1 \,μ$m, coupled with a significant reduction in the dark current of two orders of magnitude as compared to as-grown photoconductive devices. The latter yields a reduced cutoff of $2.8 \,μ$m due to the inherent compressive strain. Furthermore, the impact of chemical treatment and annealing on the device performance was also investigated showing a further reduction in the dark current. The demonstrated transfer printing, along with the use of an adhesive layer, would allow the transfer of multiple GeSn membranes onto virtually any substrate. This approach paves the way for scalable fabrication of hybrid optoelectronic devices leveraging the tunable band gap of Ge$_{1-x}$Sn$_x$ in the mid-wave infrared range.
title Transfer-printed multiple Ge$_{0.89}$Sn$_{0.11}$ membrane mid-infrared photodetectors
topic Applied Physics
Optics
url https://arxiv.org/abs/2402.03462