Saved in:
Bibliographic Details
Main Authors: Jangra, Vikas, Kataria, Satender, Lemme, Max C.
Format: Preprint
Published: 2024
Subjects:
Online Access:https://arxiv.org/abs/2402.07151
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1866913467606237184
author Jangra, Vikas
Kataria, Satender
Lemme, Max C.
author_facet Jangra, Vikas
Kataria, Satender
Lemme, Max C.
contents Graphene has been extensively studied for a variety of electronic and optoelectronic applications. The reported contact resistance between metal and graphene, or rather its specific contact resistance (R{_C}), ranges from a few tens of Ω μm up to a few kΩ μm. Manufacturable solutions for defining ohmic contacts to graphene remain a subject of research. Here, we report a scalable method based on laser irradiation of graphene to reduce the R{_C} in nickel-contacted devices. A laser with a wavelength of λ = 532 nm is used to induce defects at the contact regions, which are monitored \textit{in-situ} using micro-Raman spectroscopy. Physical damage is observed using \textit{ex-situ} atomic force and scanning electron microscopy. The transfer line method (TLM) is used to extract R{_C} from back-gated graphene devices with and without laser treatment under ambient and vacuum conditions. A significant reduction in R{_C} is observed in devices where the contacts are laser irradiated, which scales with the laser power. The lowest R{_C} of about 250 Ω μm is obtained for the devices irradiated with a laser power of 20 mW, compared to 900 Ω μm for the untreated devices. The reduction is attributed to an increase in defect density, which leads to the formation of crystallite edges and in-plane dangling bonds that enhance the injection of charge carriers from the metal into the graphene. Our work suggests laser irradiation as a scalable technology for R{_C} reduction in graphene and potentially other two-dimensional materials.
format Preprint
id arxiv_https___arxiv_org_abs_2402_07151
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Reducing the metal-graphene contact resistance through laser-induced defects
Jangra, Vikas
Kataria, Satender
Lemme, Max C.
Applied Physics
Graphene has been extensively studied for a variety of electronic and optoelectronic applications. The reported contact resistance between metal and graphene, or rather its specific contact resistance (R{_C}), ranges from a few tens of Ω μm up to a few kΩ μm. Manufacturable solutions for defining ohmic contacts to graphene remain a subject of research. Here, we report a scalable method based on laser irradiation of graphene to reduce the R{_C} in nickel-contacted devices. A laser with a wavelength of λ = 532 nm is used to induce defects at the contact regions, which are monitored \textit{in-situ} using micro-Raman spectroscopy. Physical damage is observed using \textit{ex-situ} atomic force and scanning electron microscopy. The transfer line method (TLM) is used to extract R{_C} from back-gated graphene devices with and without laser treatment under ambient and vacuum conditions. A significant reduction in R{_C} is observed in devices where the contacts are laser irradiated, which scales with the laser power. The lowest R{_C} of about 250 Ω μm is obtained for the devices irradiated with a laser power of 20 mW, compared to 900 Ω μm for the untreated devices. The reduction is attributed to an increase in defect density, which leads to the formation of crystallite edges and in-plane dangling bonds that enhance the injection of charge carriers from the metal into the graphene. Our work suggests laser irradiation as a scalable technology for R{_C} reduction in graphene and potentially other two-dimensional materials.
title Reducing the metal-graphene contact resistance through laser-induced defects
topic Applied Physics
url https://arxiv.org/abs/2402.07151