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Numerical investigation of vacuum ultra-violet emission in Ar/O$_2$ inductively coupled plasmas

Fuente: arXiv

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Bibliographic Details
Main Authors:	Engelbrecht, Michel Osca, Jenderny, Jonathan, Hylla, Henrik, Filla, Dominik, Awakowicz, Peter, Korolov, Ihor, Ridgers, Christopher P., Gibson, Andrew R.
Format:	Preprint
Published:	2024
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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