23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW
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| Main Authors: | , , , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866917708545654784 |
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| author | Cho, Sinwoo Barrera, Omar Kramer, Jack Chulukhadze, Vakhtang Hsu, Tzu-Hsuan Campbell, Joshua Anderson, Ian Lu, Ruochen |
| author_facet | Cho, Sinwoo Barrera, Omar Kramer, Jack Chulukhadze, Vakhtang Hsu, Tzu-Hsuan Campbell, Joshua Anderson, Ian Lu, Ruochen |
| contents | This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter features a compact footprint of 0.64 mm2. The third-order ladder filter is implemented with electrically coupled resonators in 150 nm bi-layer P3F 128 rotated Y-cut LiNbO3 thin film, operating in second-order symmetric (S2) Lamb mode. The record-breaking performance is enabled by the P3F LiNbO3 platform, where piezoelectric thin films of alternating orientations are transferred subsequently, facilitating efficient higher-order Lamb mode operation with simultaneously high quality factor (Q) and coupling coefficient (k2) at millimeter-wave (mmWave). Also, the multi-layer P3F stack promises smaller footprints and better nonlinearity than single-layer counterparts, thanks to the higher capacitance density and lower thermal resistance. Upon further development, the reported P3F LiNbO3 platform is promising for compact filters at mmWave. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2402_12194 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | 23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW Cho, Sinwoo Barrera, Omar Kramer, Jack Chulukhadze, Vakhtang Hsu, Tzu-Hsuan Campbell, Joshua Anderson, Ian Lu, Ruochen Applied Physics Signal Processing This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter features a compact footprint of 0.64 mm2. The third-order ladder filter is implemented with electrically coupled resonators in 150 nm bi-layer P3F 128 rotated Y-cut LiNbO3 thin film, operating in second-order symmetric (S2) Lamb mode. The record-breaking performance is enabled by the P3F LiNbO3 platform, where piezoelectric thin films of alternating orientations are transferred subsequently, facilitating efficient higher-order Lamb mode operation with simultaneously high quality factor (Q) and coupling coefficient (k2) at millimeter-wave (mmWave). Also, the multi-layer P3F stack promises smaller footprints and better nonlinearity than single-layer counterparts, thanks to the higher capacitance density and lower thermal resistance. Upon further development, the reported P3F LiNbO3 platform is promising for compact filters at mmWave. |
| title | 23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW |
| topic | Applied Physics Signal Processing |
| url | https://arxiv.org/abs/2402.12194 |