Subramanian, R. G., Moest, B., & Paarhuis, B. (2024). Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems.
Style de citation Chicago (17e éd.)Subramanian, Raaja Ganapathy, Barry Moest, et Bart Paarhuis. Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems. 2024.
Style de citation MLA (9e éd.)Subramanian, Raaja Ganapathy, et al. Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems. 2024.
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