Subramanian, R. G., Moest, B., & Paarhuis, B. (2024). Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems.
Chicago-Zitierstil (17. Ausg.)Subramanian, Raaja Ganapathy, Barry Moest, und Bart Paarhuis. Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems. 2024.
MLA-Zitierstil (9. Ausg.)Subramanian, Raaja Ganapathy, et al. Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems. 2024.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.