Interferometric microscale measurement of refractive index at VIS and IR wavelengths
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arXiv
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| Auteurs principaux: | , , , , , , , , |
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| Format: | Preprint |
| Publié: |
2024
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| _version_ | 1866929370843578368 |
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| author | Ryu, Meguya Varapnickas, Simonas Gailevicius, Darius Paipulas, Domas Vilardell, Eulalia Puig Khajehsaeidimahabadi, Zahra Juodkazis, Saulius Morikawa, Junko Malinauskas, Mangirdas |
| author_facet | Ryu, Meguya Varapnickas, Simonas Gailevicius, Darius Paipulas, Domas Vilardell, Eulalia Puig Khajehsaeidimahabadi, Zahra Juodkazis, Saulius Morikawa, Junko Malinauskas, Mangirdas |
| contents | Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~μ$m thickness were determined at visible and IR (2.5-13~$μ$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2402_15249 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Interferometric microscale measurement of refractive index at VIS and IR wavelengths Ryu, Meguya Varapnickas, Simonas Gailevicius, Darius Paipulas, Domas Vilardell, Eulalia Puig Khajehsaeidimahabadi, Zahra Juodkazis, Saulius Morikawa, Junko Malinauskas, Mangirdas Optics Applied Physics Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~μ$m thickness were determined at visible and IR (2.5-13~$μ$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution. |
| title | Interferometric microscale measurement of refractive index at VIS and IR wavelengths |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2402.15249 |