Twenty-nine million Intrinsic Q-factor Monolithic Microresonators on Thin Film Lithium Niobate

Fuente: arXiv
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Auteurs principaux: Zhu, Xinrui, Hu, Yaowen, Lu, Shengyuan, Warner, Hana K., Li, Xudong, Song, Yunxiang, Magalhaes, Leticia, Shams-Ansari, Amirhassan, Sinclair, Neil, Loncar, Marko
Format: Preprint
Publié: 2024
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author Zhu, Xinrui
Hu, Yaowen
Lu, Shengyuan
Warner, Hana K.
Li, Xudong
Song, Yunxiang
Magalhaes, Leticia
Shams-Ansari, Amirhassan
Sinclair, Neil
Loncar, Marko
author_facet Zhu, Xinrui
Hu, Yaowen
Lu, Shengyuan
Warner, Hana K.
Li, Xudong
Song, Yunxiang
Magalhaes, Leticia
Shams-Ansari, Amirhassan
Sinclair, Neil
Loncar, Marko
contents The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution of Q factors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within one order of magnitude of the material limit.
format Preprint
id arxiv_https___arxiv_org_abs_2402_16161
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Twenty-nine million Intrinsic Q-factor Monolithic Microresonators on Thin Film Lithium Niobate
Zhu, Xinrui
Hu, Yaowen
Lu, Shengyuan
Warner, Hana K.
Li, Xudong
Song, Yunxiang
Magalhaes, Leticia
Shams-Ansari, Amirhassan
Sinclair, Neil
Loncar, Marko
Optics
Applied Physics
The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution of Q factors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within one order of magnitude of the material limit.
title Twenty-nine million Intrinsic Q-factor Monolithic Microresonators on Thin Film Lithium Niobate
topic Optics
Applied Physics
url https://arxiv.org/abs/2402.16161