C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz
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arXiv
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| Main Authors: | , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866911976190377984 |
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| author | Hsu, Tzu-Hsuan Campbell, Joshua Kramer, Jack Cho, Sinwoo Li, Ming-Huang Lu, Ruochen |
| author_facet | Hsu, Tzu-Hsuan Campbell, Joshua Kramer, Jack Cho, Sinwoo Li, Ming-Huang Lu, Ruochen |
| contents | In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (kt2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide (SiC) platform, featuring an excellent figure-of-merit (FoM = kt2*Q ) of 124 at 6.5 GHz, the highest FoM reported in this frequency range. The resonator frequency upscaling is achieved through wavelength ($λ$) reduction and the use of thin aluminum (Al) electrodes. The LN/SiC waveguide and synchronous resonator design collectively enable effective acoustic energy confinement for a high FoM, even when the normalized thickness of LN approaches a scale of 0.5$λ$ to 1$λ$. To perform a comprehensive study, we also designed and fabricated five additional resonators, expending the $λ$ studied ranging from 480 to 800 nm, in the same 500 nm-thick transferred Y-cut thin-film LN on SiC. The fabricated SH-SAW resonators, operating from 5 to 8 GHz, experimentally demonstrate a kt2 from 20.3% to 22.9% and a Q from 350 to 575, thereby covering the entire C-band with excellent performance. |
| format | Preprint |
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arxiv_https___arxiv_org_abs_2402_16732 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz Hsu, Tzu-Hsuan Campbell, Joshua Kramer, Jack Cho, Sinwoo Li, Ming-Huang Lu, Ruochen Signal Processing In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (kt2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide (SiC) platform, featuring an excellent figure-of-merit (FoM = kt2*Q ) of 124 at 6.5 GHz, the highest FoM reported in this frequency range. The resonator frequency upscaling is achieved through wavelength ($λ$) reduction and the use of thin aluminum (Al) electrodes. The LN/SiC waveguide and synchronous resonator design collectively enable effective acoustic energy confinement for a high FoM, even when the normalized thickness of LN approaches a scale of 0.5$λ$ to 1$λ$. To perform a comprehensive study, we also designed and fabricated five additional resonators, expending the $λ$ studied ranging from 480 to 800 nm, in the same 500 nm-thick transferred Y-cut thin-film LN on SiC. The fabricated SH-SAW resonators, operating from 5 to 8 GHz, experimentally demonstrate a kt2 from 20.3% to 22.9% and a Q from 350 to 575, thereby covering the entire C-band with excellent performance. |
| title | C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz |
| topic | Signal Processing |
| url | https://arxiv.org/abs/2402.16732 |