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Extreme ultraviolet lithography reaches 5 nm resolution

Fuente: arXiv

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Bibliographic Details
Main Authors:	Giannopoulos, Iason, Mochi, Iacopo, Vockenhuber, Michaela, Ekinci, Yasin, Kazazis, Dimitrios
Format:	Preprint
Published:	2024
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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