Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging

Fuente: arXiv
Saved in:
Bibliographic Details
Main Authors: Chayanun, Lert, Biznárová, Janka, Zeng, Lunjie, Malmberg, Per, Nylander, Andreas, Osman, Amr, Rommel, Marcus, Tam, Pui Lam, Olsson, Eva, Yurgens, August, Bylander, Jonas, Roudsari, Anita Fadavi
Format: Preprint
Published: 2024
Subjects:
Online Access:
Tags: Add Tag
No Tags, Be the first to tag this record!