Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging
Fuente:
arXiv
Guardado en:
| Autores principales: | Chayanun, Lert, Biznárová, Janka, Zeng, Lunjie, Malmberg, Per, Nylander, Andreas, Osman, Amr, Rommel, Marcus, Tam, Pui Lam, Olsson, Eva, Yurgens, August, Bylander, Jonas, Roudsari, Anita Fadavi |
|---|---|
| Formato: | Preprint |
| Publicado: |
2024
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| Materias: | |
| Acceso en línea: | |
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