Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlO$_x$/Nb trilayer
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arXiv
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| Auteurs principaux: | , , |
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| Format: | Preprint |
| Publié: |
2024
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| _version_ | 1866909359382986752 |
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| author | Adam, Fabienne Enss, Christian Kempf, Sebastian |
| author_facet | Adam, Fabienne Enss, Christian Kempf, Sebastian |
| contents | Josephson tunnel junctions form the basis for various superconducting electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process for high-quality Josephson junctions. Here, we present an anodization-free fabrication process for Nb/Al-AlO$_x$/Nb cross-type Josephson junctions that requires only a small number of process steps and that is intrinsically compatible with wafer-scale fabrication. We show that the fabricated junctions are of very high-quality and, compared to other junction types, exhibit not only a significantly reduced capacitance but also an almost rectangular critical current density profile. Our process hence enables the usage of low capacitance Josephson junctions for superconducting electronic devices such as ultra-low noise dc-SQUIDs, microwave SQUID multiplexers based on non-hysteretic rf-SQUIDs and RFSQ circuits. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2403_01806 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlO$_x$/Nb trilayer Adam, Fabienne Enss, Christian Kempf, Sebastian Superconductivity Instrumentation and Detectors Josephson tunnel junctions form the basis for various superconducting electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process for high-quality Josephson junctions. Here, we present an anodization-free fabrication process for Nb/Al-AlO$_x$/Nb cross-type Josephson junctions that requires only a small number of process steps and that is intrinsically compatible with wafer-scale fabrication. We show that the fabricated junctions are of very high-quality and, compared to other junction types, exhibit not only a significantly reduced capacitance but also an almost rectangular critical current density profile. Our process hence enables the usage of low capacitance Josephson junctions for superconducting electronic devices such as ultra-low noise dc-SQUIDs, microwave SQUID multiplexers based on non-hysteretic rf-SQUIDs and RFSQ circuits. |
| title | Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlO$_x$/Nb trilayer |
| topic | Superconductivity Instrumentation and Detectors |
| url | https://arxiv.org/abs/2403.01806 |