Enhanced polarization switching characteristics of HfO2 ultrathin films via acceptor-donor co-doping

Fuente: arXiv
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Autori principali: Zhou, Chao, Ma, Liyang, Feng, Yanpeng, Kuo, Chang-Yang, Ku, Yu-Chieh, Liu, Cheng-En, Cheng, Xianlong, Li, Jingxuan, Si, Yangyang, Huang, Haoliang, Huang, Yan, Zhao, Hongjian, Chang, Chun-Fu, Das, Sujit, Liu, Shi, Chen, Zuhuang
Natura: Preprint
Pubblicazione: 2024
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author Zhou, Chao
Ma, Liyang
Feng, Yanpeng
Kuo, Chang-Yang
Ku, Yu-Chieh
Liu, Cheng-En
Cheng, Xianlong
Li, Jingxuan
Si, Yangyang
Huang, Haoliang
Huang, Yan
Zhao, Hongjian
Chang, Chun-Fu
Das, Sujit
Liu, Shi
Chen, Zuhuang
author_facet Zhou, Chao
Ma, Liyang
Feng, Yanpeng
Kuo, Chang-Yang
Ku, Yu-Chieh
Liu, Cheng-En
Cheng, Xianlong
Li, Jingxuan
Si, Yangyang
Huang, Haoliang
Huang, Yan
Zhao, Hongjian
Chang, Chun-Fu
Das, Sujit
Liu, Shi
Chen, Zuhuang
contents In the realm of ferroelectric memories, HfO2-based ferroelectrics stand out because of their exceptional CMOS compatibility and scalability. Nevertheless, their switchable polarization and switching speed are not on par with those of perovskite ferroelectrics. It is widely acknowledged that defects play a crucial role in stabilizing the metastable polar phase of HfO2. Simultaneously, defects also pin the domain walls and impede the switching process, ultimately rendering the sluggish switching of HfO2. Herein, we present an effective strategy involving acceptor-donor co-doping to effectively tackle this dilemma. Remarkably enhanced ferroelectricity and the fastest switching process ever reported among HfO2 polar devices are observed in La3+-Ta5+ co-doped HfO2 ultrathin films. Moreover, robust macro-electrical characteristics of co-doped films persist even at a thickness as low as 3 nm, expanding potential applications of HfO2 in ultrathin devices. Our systematic investigations further demonstrate that synergistic effects of uniform microstructure and smaller switching barrier introduced by co-doping ensure the enhanced ferroelectricity and shortened switching time. The co-doping strategy offers an effective avenue to control the defect state and improve the ferroelectric properties of HfO2 films.
format Preprint
id arxiv_https___arxiv_org_abs_2403_04994
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Enhanced polarization switching characteristics of HfO2 ultrathin films via acceptor-donor co-doping
Zhou, Chao
Ma, Liyang
Feng, Yanpeng
Kuo, Chang-Yang
Ku, Yu-Chieh
Liu, Cheng-En
Cheng, Xianlong
Li, Jingxuan
Si, Yangyang
Huang, Haoliang
Huang, Yan
Zhao, Hongjian
Chang, Chun-Fu
Das, Sujit
Liu, Shi
Chen, Zuhuang
Materials Science
In the realm of ferroelectric memories, HfO2-based ferroelectrics stand out because of their exceptional CMOS compatibility and scalability. Nevertheless, their switchable polarization and switching speed are not on par with those of perovskite ferroelectrics. It is widely acknowledged that defects play a crucial role in stabilizing the metastable polar phase of HfO2. Simultaneously, defects also pin the domain walls and impede the switching process, ultimately rendering the sluggish switching of HfO2. Herein, we present an effective strategy involving acceptor-donor co-doping to effectively tackle this dilemma. Remarkably enhanced ferroelectricity and the fastest switching process ever reported among HfO2 polar devices are observed in La3+-Ta5+ co-doped HfO2 ultrathin films. Moreover, robust macro-electrical characteristics of co-doped films persist even at a thickness as low as 3 nm, expanding potential applications of HfO2 in ultrathin devices. Our systematic investigations further demonstrate that synergistic effects of uniform microstructure and smaller switching barrier introduced by co-doping ensure the enhanced ferroelectricity and shortened switching time. The co-doping strategy offers an effective avenue to control the defect state and improve the ferroelectric properties of HfO2 films.
title Enhanced polarization switching characteristics of HfO2 ultrathin films via acceptor-donor co-doping
topic Materials Science
url https://arxiv.org/abs/2403.04994