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Main Authors: Moghaddam, Mahsa Haddadi, Wang, Zhihao, Dalayoan, Daryll J. C, Park, Daehwan, Kim, Hwanhee, Im, Sunghoon, Ji, Kyungbin, Kang, Daeshik, Das, Bamadev, Kim, Dai Sik
Format: Preprint
Published: 2024
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Online Access:https://arxiv.org/abs/2403.08288
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author Moghaddam, Mahsa Haddadi
Wang, Zhihao
Dalayoan, Daryll J. C
Park, Daehwan
Kim, Hwanhee
Im, Sunghoon
Ji, Kyungbin
Kang, Daeshik
Das, Bamadev
Kim, Dai Sik
author_facet Moghaddam, Mahsa Haddadi
Wang, Zhihao
Dalayoan, Daryll J. C
Park, Daehwan
Kim, Hwanhee
Im, Sunghoon
Ji, Kyungbin
Kang, Daeshik
Das, Bamadev
Kim, Dai Sik
contents Metal thin films on soft polymers provide a unique opportunity for resistance-based strain sensors. A mechanical mismatch between the conductive film and the flexible substrate causes cracks to open and close, changing the electrical resistance as a function of strain. However, the very randomness of the formation, shape, length, orientation, and distance between adjacent cracks limits the sensing range as well as repeatability. Herein, we present a breakthrough: the Zerogap Strain Sensor, whereby lithography eliminates randomness and violent tearing process inherent in conventional crack sensors and allows for short periodicity between gaps with gentle sidewall contacts, critical in high strain sensing enabling operation over an unprecedently wide range. Our sensor achieves a gauge factor of over 15,000 at εext=18%, the highest known value. With the uniform gaps of three-to-ten thousand nanometer widths characterized by periodicity and strain, this approach has far reaching implications for future strain sensors whose range is limited only by that of the flexible substrate, with non-violent operations that always remain below the tensile limit of the metal.
format Preprint
id arxiv_https___arxiv_org_abs_2403_08288
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Lithographically Defined Zerogap Strain Sensors
Moghaddam, Mahsa Haddadi
Wang, Zhihao
Dalayoan, Daryll J. C
Park, Daehwan
Kim, Hwanhee
Im, Sunghoon
Ji, Kyungbin
Kang, Daeshik
Das, Bamadev
Kim, Dai Sik
Applied Physics
Metal thin films on soft polymers provide a unique opportunity for resistance-based strain sensors. A mechanical mismatch between the conductive film and the flexible substrate causes cracks to open and close, changing the electrical resistance as a function of strain. However, the very randomness of the formation, shape, length, orientation, and distance between adjacent cracks limits the sensing range as well as repeatability. Herein, we present a breakthrough: the Zerogap Strain Sensor, whereby lithography eliminates randomness and violent tearing process inherent in conventional crack sensors and allows for short periodicity between gaps with gentle sidewall contacts, critical in high strain sensing enabling operation over an unprecedently wide range. Our sensor achieves a gauge factor of over 15,000 at εext=18%, the highest known value. With the uniform gaps of three-to-ten thousand nanometer widths characterized by periodicity and strain, this approach has far reaching implications for future strain sensors whose range is limited only by that of the flexible substrate, with non-violent operations that always remain below the tensile limit of the metal.
title Lithographically Defined Zerogap Strain Sensors
topic Applied Physics
url https://arxiv.org/abs/2403.08288