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| Auteurs principaux: | , , , , , , , |
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| Format: | Preprint |
| Publié: |
2024
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| Sujets: | |
| Accès en ligne: | https://arxiv.org/abs/2403.13396 |
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| _version_ | 1866914721220788224 |
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| author | Vaillant, Jérôme Dilhan, Lucie Ostrovsky, Alain Abadie, Quentin Masarotto, Lilian Paquet, Romain Cavelier, Mickaël Bellegarde, Cyril |
| author_facet | Vaillant, Jérôme Dilhan, Lucie Ostrovsky, Alain Abadie, Quentin Masarotto, Lilian Paquet, Romain Cavelier, Mickaël Bellegarde, Cyril |
| contents | In this paper we present two design generations of metasurface-based planar microlenses implemented on Front-Side Illumination SPAD pixels. This kind of microlens is an alternative to conventional reflow microlens. It offers more degrees of freedom in term of design, especially the capability to design off-axis microlens to gather light around the SPAD photodiode. The two generations of microlenses have been fabricated on STMicroelectronics SPAD and characterized. We validated the sensitivity improvement offered by extended metasurface-based microlens. We also confirmed the impact of lithography capability on metasurface performances, highlighting the |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2403_13396 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Metasurface-based planar microlenses for SPAD pixels Vaillant, Jérôme Dilhan, Lucie Ostrovsky, Alain Abadie, Quentin Masarotto, Lilian Paquet, Romain Cavelier, Mickaël Bellegarde, Cyril Optics Applied Physics In this paper we present two design generations of metasurface-based planar microlenses implemented on Front-Side Illumination SPAD pixels. This kind of microlens is an alternative to conventional reflow microlens. It offers more degrees of freedom in term of design, especially the capability to design off-axis microlens to gather light around the SPAD photodiode. The two generations of microlenses have been fabricated on STMicroelectronics SPAD and characterized. We validated the sensitivity improvement offered by extended metasurface-based microlens. We also confirmed the impact of lithography capability on metasurface performances, highlighting the |
| title | Metasurface-based planar microlenses for SPAD pixels |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2403.13396 |