Vibration Sensitivity of one-port and two-port MEMS microphones
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arXiv
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| Main Authors: | Doyon-D'Amour, Francis, Stalder, Carly, Hodges, Timothy, Stephan, Michel, Wu, Lixiue, Koukoulas, Triantafillos, Leahy, Stephane, St-Gelais, Raphael |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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