Needle in a haystack: efficiently finding atomically defined quantum dots for electrostatic force microscopy
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arXiv
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| Autores principales: | , , , , , , , |
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| Formato: | Preprint |
| Publicado: |
2024
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| Materias: | |
| Acceso en línea: | |
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| _version_ | 1866913275897184256 |
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| author | Bustamante, José Miyahara, Yoichi Fairgrieve-Park, Logan Spruce, Kieran See, Patrick Curson, Neil Stock, Taylor Grutter, Peter |
| author_facet | Bustamante, José Miyahara, Yoichi Fairgrieve-Park, Logan Spruce, Kieran See, Patrick Curson, Neil Stock, Taylor Grutter, Peter |
| contents | The ongoing development of single electron, nano and atomic scale semiconductor devices would benefit greatly from a characterization tool capable of detecting single electron charging events with high spatial resolution, at low temperature. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. Characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We therefore also present a process to efficiently find a nanometre size quantum dot buried in a $10 \times 10~\text{mm}^2$ silicon sample using a combination of optical positioning, capacitive sensors and AFM topography in vacuum. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2403_13935 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Needle in a haystack: efficiently finding atomically defined quantum dots for electrostatic force microscopy Bustamante, José Miyahara, Yoichi Fairgrieve-Park, Logan Spruce, Kieran See, Patrick Curson, Neil Stock, Taylor Grutter, Peter Mesoscale and Nanoscale Physics Instrumentation and Detectors The ongoing development of single electron, nano and atomic scale semiconductor devices would benefit greatly from a characterization tool capable of detecting single electron charging events with high spatial resolution, at low temperature. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. Characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We therefore also present a process to efficiently find a nanometre size quantum dot buried in a $10 \times 10~\text{mm}^2$ silicon sample using a combination of optical positioning, capacitive sensors and AFM topography in vacuum. |
| title | Needle in a haystack: efficiently finding atomically defined quantum dots for electrostatic force microscopy |
| topic | Mesoscale and Nanoscale Physics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2403.13935 |