Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
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arXiv
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| Auteurs principaux: | , , , , , , , , , , , |
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| Format: | Preprint |
| Publié: |
2024
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| _version_ | 1866917625069568000 |
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| author | Gardner, Dennis F. Tanksalvala, Michael Shanblatt, Elisabeth R. Zhang, Xiaoshi Galloway, Benjamin R. Porter, Christina L. Karl Jr., Robert Bevis, Charles Adams, Daniel E. Kapteyn, Henry C. Murnane, Margaret M. Mancini, Giulia F. |
| author_facet | Gardner, Dennis F. Tanksalvala, Michael Shanblatt, Elisabeth R. Zhang, Xiaoshi Galloway, Benjamin R. Porter, Christina L. Karl Jr., Robert Bevis, Charles Adams, Daniel E. Kapteyn, Henry C. Murnane, Margaret M. Mancini, Giulia F. |
| contents | Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wavelength of the light. Recently, advances in coherent short wavelength light sources, coupled with progress in algorithm development, have significantly enhanced the power of x-ray imaging. However, to date, high-fidelity diffraction imaging of periodic objects has been a challenge because the scattered light is concentrated in isolated peaks. Here, we use tabletop 13.5nm high harmonic beams to make two significant advances. First we demonstrate high-quality imaging of an extended, nearly-periodic sample for the first time. Second, we achieve sub-wavelength spatial resolution (12.6nm) imaging at short wavelengths, also for the first time. The key to both advances is a novel technique called modulus enforced probe, which enables robust, quantitative, reconstructions of periodic objects. This work is important for imaging next generation nano-engineered devices. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2403_19766 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source Gardner, Dennis F. Tanksalvala, Michael Shanblatt, Elisabeth R. Zhang, Xiaoshi Galloway, Benjamin R. Porter, Christina L. Karl Jr., Robert Bevis, Charles Adams, Daniel E. Kapteyn, Henry C. Murnane, Margaret M. Mancini, Giulia F. Optics Instrumentation and Detectors Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wavelength of the light. Recently, advances in coherent short wavelength light sources, coupled with progress in algorithm development, have significantly enhanced the power of x-ray imaging. However, to date, high-fidelity diffraction imaging of periodic objects has been a challenge because the scattered light is concentrated in isolated peaks. Here, we use tabletop 13.5nm high harmonic beams to make two significant advances. First we demonstrate high-quality imaging of an extended, nearly-periodic sample for the first time. Second, we achieve sub-wavelength spatial resolution (12.6nm) imaging at short wavelengths, also for the first time. The key to both advances is a novel technique called modulus enforced probe, which enables robust, quantitative, reconstructions of periodic objects. This work is important for imaging next generation nano-engineered devices. |
| title | Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source |
| topic | Optics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2403.19766 |