APA (7th ed.) Citation

Chen, Y., Deforce, J., De Ridder, V., Dey, B., Blanco, V., Halder, S., & Leray, P. (2024). Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS.

Chicago Style (17th ed.) Citation

Chen, Ying-Lin, Jacob Deforce, Vic De Ridder, Bappaditya Dey, Victor Blanco, Sandip Halder, and Philippe Leray. Towards Improved Semiconductor Defect Inspection for High-NA EUVL Based on SEMI-SuperYOLO-NAS. 2024.

MLA (9th ed.) Citation

Chen, Ying-Lin, et al. Towards Improved Semiconductor Defect Inspection for High-NA EUVL Based on SEMI-SuperYOLO-NAS. 2024.