Overlapping Top Gate Electrodes based on Low Temperature Atomic Layer Deposition for Nanoscale Ambipolar Lateral Junctions

Fuente: arXiv
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Bibliographic Details
Main Authors: Fuchs, Christopher, Fürst, Lena, Buhmann, Hartmut, Kleinlein, Johannes, Molenkamp, Laurens W.
Format: Preprint
Published: 2024
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