Hydrogen plasma inhibits ion beam restructuring of materials
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arXiv
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| Autores principales: | , , , |
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| Formato: | Preprint |
| Publicado: |
2024
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| Acceso en línea: | |
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| _version_ | 1866910414427652096 |
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| author | Scott, John A. Bishop, James Budnik, Garrett Toth, Milos |
| author_facet | Scott, John A. Bishop, James Budnik, Garrett Toth, Milos |
| contents | Focused ion beam (FIB) techniques are employed widely for nanofabrication, and processing of materials and devices. However, ion irradiation often gives rise to severe damage due to atomic displacements that cause defect formation, migration and clustering within the ion-solid interaction volume. The resulting restructuring degrades the functionality of materials, and limits the utility FIB ablation and nanofabrication techniques. Here we show that such restructuring can be inhibited by performing FIB irradiation in a hydrogen plasma environment via chemical pathways that modify defect binding energies and transport kinetics, as well as material ablation rates. The method is minimally-invasive and has the potential to greatly expand the utility of FIB nanofabrication techniques in processing of functional materials and devices. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2404_11779 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Hydrogen plasma inhibits ion beam restructuring of materials Scott, John A. Bishop, James Budnik, Garrett Toth, Milos Applied Physics Instrumentation and Detectors Focused ion beam (FIB) techniques are employed widely for nanofabrication, and processing of materials and devices. However, ion irradiation often gives rise to severe damage due to atomic displacements that cause defect formation, migration and clustering within the ion-solid interaction volume. The resulting restructuring degrades the functionality of materials, and limits the utility FIB ablation and nanofabrication techniques. Here we show that such restructuring can be inhibited by performing FIB irradiation in a hydrogen plasma environment via chemical pathways that modify defect binding energies and transport kinetics, as well as material ablation rates. The method is minimally-invasive and has the potential to greatly expand the utility of FIB nanofabrication techniques in processing of functional materials and devices. |
| title | Hydrogen plasma inhibits ion beam restructuring of materials |
| topic | Applied Physics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2404.11779 |