Controlled Spalling of Single Crystal 4H-SiC Bulk Substrates
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arXiv
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| Main Authors: | Horn, Connor P, Wicker, Christina, Wellisz, Antoni, Zeledon, Cyrus, Nittala, Pavani Vamsi Krishna, Heremans, F Joseph, Awschalom, David D, Guha, Supratik |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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