Controlled Spalling of Single Crystal 4H-SiC Bulk Substrates

Fuente: arXiv
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Bibliographic Details
Main Authors: Horn, Connor P, Wicker, Christina, Wellisz, Antoni, Zeledon, Cyrus, Nittala, Pavani Vamsi Krishna, Heremans, F Joseph, Awschalom, David D, Guha, Supratik
Format: Preprint
Published: 2024
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