Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices

Fuente: arXiv

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Bibliographic Details
Main Authors:	Patidar, Jyotish, Thorwarth, Kerstin, Schmitz-Kempen, Thorsten, Kessels, Roland, Siol, Sebastian
Format:	Preprint
Published:	2024
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2405.00210