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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Patidar, Jyotish, Thorwarth, Kerstin, Schmitz-Kempen, Thorsten, Kessels, Roland, Siol, Sebastian
Formato:	Preprint
Publicado:	2024
Materias:	Materials Science
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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