Significant tuning of dispersive mode coupling in doubly clamped MEMS beam resonators using thermally induced buckling effect

Fuente: arXiv
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Bibliographic Details
Main Authors: Li, Chao, Liu, Qian, Uchida, Kohei, Li, Hua, Hirakawa, Kazuhiko, Zhang, Ya
Format: Preprint
Published: 2024
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