Significant tuning of dispersive mode coupling in doubly clamped MEMS beam resonators using thermally induced buckling effect
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arXiv
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| Auteurs principaux: | Li, Chao, Liu, Qian, Uchida, Kohei, Li, Hua, Hirakawa, Kazuhiko, Zhang, Ya |
|---|---|
| Format: | Preprint |
| Publié: |
2024
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| Sujets: | |
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