Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators
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arXiv
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| Main Authors: | Bredol, Philipp, David, Felix, Jagtap, Nagesh S., Klaß, Yannick S., Astakhov, Georgy V., Erbe, Artur, Weig, Eva M. |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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