Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD

Fuente: arXiv
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Bibliographic Details
Main Authors: Barsukov, Yuri, Kaganovich, Igor D., Mokrov, Mikhail, Khrabry, Alexander
Format: Preprint
Published: 2024
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