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Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Barsukov, Yuri, Kaganovich, Igor D., Mokrov, Mikhail, Khrabry, Alexander
Formato:	Preprint
Publicado:	2024
Materias:	Chemical Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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