Cover Image

Atomic layer etching of SiO$_2$ using sequential exposures of Al(CH$_3$)$_3$ and H$_2$/SF$_6$ plasma

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Catherall, David, Hossain, Azmain, Minnich, Austin
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Atomic layer etching of niobium nitride using sequential exposures of O$_2$ and H$_2$/SF$_6$ plasmas
by: Hossain, Azmain A., et al.
Published: (2025)

Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H$_2$ and SF$_6$ plasmas
by: Chen, Ivy I., et al.
Published: (2023)

Atomic layer etching of SiO$_2$ using sequential SF$_6$ gas and Ar plasma
by: Peng, Jun, et al.
Published: (2024)

Atomic layer etching of InGaAs using sequential exposures of atomic hydrogen and oxygen gas
by: Bayrak, Mete M., et al.
Published: (2025)

Characterization of ion track etched conical nanopores in thermal and PECVD SiO$_{2}$ using small angle X-ray scattering
by: Dutt, Shankar, et al.
Published: (2025)

Si/AlN p-n heterojunction interfaced with ultrathin SiO2
by: Abbasi, Haris Naeem, et al.
Published: (2024)

Nanostructuring SiC by sequential plasma oxidation and reactive ion etching
by: Isometsä, Joonas, et al.
Published: (2026)

Effect of Top Al$_2$O$_3$ Interlayer Thickness on Memory Window and Reliability of FeFETs With TiN/Al$_2$O$_3$/Hf$_{0.5}$Zr$_{0.5}$O$_2$/SiO$_x$/Si (MIFIS) Gate Structure
by: Hu, Tao, et al.
Published: (2024)

Linear and Nonlinear Optical Properties of SiO$_2$/TiO$_2$ Heterostructures Grown by Plasma Enhanced Atomic Layer Deposition
by: Liu, Jinsong, et al.
Published: (2025)

Planar and 3-dimensional damage free etching of $β$-Ga2O3 using atomic gallium flux
by: Kalarickal, Nidhin Kurian, et al.
Published: (2021)

Structural and optical properties of self-assembled AlN nanowires grown on SiO2/Si substrates by molecular beam epitaxy
by: Gačević, Ž., et al.
Published: (2024)

Towards controllable Si-doping in oxide molecular beam epitaxy using a solid SiO source: Application to $β$-Ga2O3
by: Ardenghi, A., et al.
Published: (2022)

Humidity Sensing Properties of Different Atomic Layers of Graphene on SiO2/Si Substrate
by: Gao, Qiang, et al.
Published: (2024)

Impact of the Top SiO2 Interlayer Thickness on Memory Window of Si Channel FeFET with TiN/SiO2/Hf0.5Zr0.5O2/SiOx/Si (MIFIS) Gate Structure
by: Hu, Tao, et al.
Published: (2024)

Effect of Al2O3 on the operation of SiNX-based MIS RRAMs
by: Mavropoulis, A. E., et al.
Published: (2025)

Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
by: Chen, Ivy I., et al.
Published: (2025)

Atomic-scale order enables high thermal boundary conductance at $β$-Ga$_2$O$_3$/4H-SiC interfaces
by: Yang, Hongao, et al.
Published: (2026)

Etching-to-deposition transition in SiO$_2$/Si$_3$N$_4$ using CH$_x$F$_y$ ion-based plasma etching: An atomistic study with neural network potentials
by: An, Hyungmin, et al.
Published: (2025)

Impact of the NO annealing duration on the SiO2/4H-SiC interface properties in lateral MOSFETs: the energetic profile of the near-interface-oxide traps
by: Fiorenza, Patrick, et al.
Published: (2024)

Si/SiO$_\text{2}$ MOSFET Reliability Physics: From Four-State Model to All-State Model
by: Guo, Xinjing, et al.
Published: (2024)

Electrical and Structural Properties of In-Situ MOCVD Grown Al$_2$O$_3$/$β$-Ga$_2$O$_3$ and Al$_2$O$_3$/$β$-(Al$_x$Ga$_{1-x}$)$_2$O$_3$ MOSCAPs
by: Bhuiyan, A F M Anhar Uddin, et al.
Published: (2025)

Modeling of High-Sensitivity SAW Magnetic Field Sensors with Au-SiO2 Phononic Crystals
by: Samadi, Mohsen, et al.
Published: (2025)

Scavenging effect on plasma oxidized Gd$_2$O$_3$ grown by high pressure sputtering on Si and InP substrates
by: Pampillón, María Ángela, et al.
Published: (2024)

Threshold Switching in Vertically Aligned MoS${_2}$/SiO${_x}$ Heterostructures based on Silver Ion Migration
by: Lee, Jimin, et al.
Published: (2025)

Rock-salt ScN(113) layers grown on AlN$(11\bar{2}2)$ by plasma-assisted molecular beam epitaxy
by: Dinh, Duc V., et al.
Published: (2025)

Crack-free Sc$_{x}$Al$_{1-x}$N(000$\bar{1}$) layers grown on Si(111) by plasma-assisted molecular beam epitaxy
by: Dinh, Duc V., et al.
Published: (2024)

Optical excitation and detection of high-frequency Sezawa modes in Si/SiO2 system decorated with Ni80Fe20 nanodot arrays
by: Graczyk, Piotr, et al.
Published: (2025)

Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition
by: Mahuli, Neha, et al.
Published: (2025)

Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon
by: Boukhvalov, D. W., et al.
Published: (2024)

A new critical growth parameter and mechanistic model for SiC nanowire synthesis via Si substrate carbonization: the role of H$_2$/CH$_4$ gas flow ratio
by: Koo, Junghyun, et al.
Published: (2024)

In-vacuum surface flashover of SiN, AlN, and etched SiO2 thin films at micrometre scales
by: Kumar, Vijay, et al.
Published: (2025)

Enhanced mechanical properties of SiO 2f /SiO 2 composites via sol–gel fabrication of Al 2 O 3 coatings on quartz fiber
by: Jiexin Jiao, et al.
Published: (2025)

Mechanism of $E'_γ$ Defect Generation in Ionizing-irradiated $a$-SiO$_2$: The Nonradiative Carrier Capture-Structural Relaxation Model
by: Song, Yu, et al.
Published: (2024)

High-performance thermochromic multilayer coatings with W-doped VO2 nanoparticles dispersed in SiO2 matrix prepared on glass at a low temperature
by: Vlcek, Jaroslav, et al.
Published: (2025)

Green Synthesis of ZnO@SiO2, CuO@SiO2, and Al₂O₃@SiO2 Nanocomposites Using Calligonum comosum L. Extract: Synthesis, Characterization, Photocatalysis, and Antioxidant Applications
by: Ahlam Hacine Gharbi, et al.
Published: (2025)

Energy Bands and Breakdown Characteristics in Al2O3/UWBG AlGaN Heterostructures
by: Shin, Seungheon, et al.
Published: (2025)

Dielectric Reliability and Interface Trap Characterization in MOCVD grown In-situ Al$_2$O$_3$ on $β$-Ga$_2$O$_3$
by: Roy, Saurav, et al.
Published: (2024)

Unlocking the hybrid piezo and pyroelectric nanogenerators performance by SiO2 nanowires confinement in poly(vinylidene fluoride)
by: Delgado-Alvarez, Juan, et al.
Published: (2025)

AlGaAs/GeSn p-i-n diode interfaced with ultrathin Al$_2$O$_3$
by: Liu, Yang, et al.
Published: (2024)

Comparative structural study of Al 2 O 3 –SiO 2 glasses and amorphous thin films
by: Sirine Ben Khemis, et al.
Published: (2024)