Direct electron beam writing of silver using a $β$-diketonate precursor: first insights
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arXiv
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| Main Authors: | Höflich, Katja, Mackosz, Krzysztof, Jureddy, Chinmai S., Tsarapkin, Aleksei, Utke, Ivo |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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