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Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering

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Bibliographic Details
Main Authors:	Thorwarth, K., Watroba, M., Pshyk, O., Zhuk, S., Patidar, J., Schwiedrzik, J., Sommerhäuser, J., Sommerhäuser, L., Siol, S.
Format:	Preprint
Published:	2024
Subjects:	Materials Science
Online Access:	Acceder al recurso
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