2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate

Fuente: arXiv
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Main Authors: Chulukhadze, Vakhtang, Kramer, Jack, Hsu, Tzu-Hsuan, Barrera, Omar, Anderson, Ian, Cho, Sinwoo, Campbell, Joshua, Lu, Ruochen
Format: Preprint
Published: 2024
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author Chulukhadze, Vakhtang
Kramer, Jack
Hsu, Tzu-Hsuan
Barrera, Omar
Anderson, Ian
Cho, Sinwoo
Campbell, Joshua
Lu, Ruochen
author_facet Chulukhadze, Vakhtang
Kramer, Jack
Hsu, Tzu-Hsuan
Barrera, Omar
Anderson, Ian
Cho, Sinwoo
Campbell, Joshua
Lu, Ruochen
contents As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold significant promise if frequency scaled to the 6G centimeter bands. Concurrently, the lateral wavelength dependency and the traveling wave nature of S0 mode enable monolithic multi-frequency fabrication, transversal filters, correlators, and other compact signal processing components. In this work, we present thin-film lithium niobate (LN) S0 resonators scaled up to 16 GHz. Specifically, we study the characteristics of the S0 mode as the wavelength is minimized and showcase a device at 14.9 GHz with a Bode Q maximum of 391, a k2 of 6%, and a figure of merit (FoM) of 23.33, surpassing the state-of-the-art (SoA) in its frequency range.
format Preprint
id arxiv_https___arxiv_org_abs_2405_08139
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle 2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate
Chulukhadze, Vakhtang
Kramer, Jack
Hsu, Tzu-Hsuan
Barrera, Omar
Anderson, Ian
Cho, Sinwoo
Campbell, Joshua
Lu, Ruochen
Applied Physics
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold significant promise if frequency scaled to the 6G centimeter bands. Concurrently, the lateral wavelength dependency and the traveling wave nature of S0 mode enable monolithic multi-frequency fabrication, transversal filters, correlators, and other compact signal processing components. In this work, we present thin-film lithium niobate (LN) S0 resonators scaled up to 16 GHz. Specifically, we study the characteristics of the S0 mode as the wavelength is minimized and showcase a device at 14.9 GHz with a Bode Q maximum of 391, a k2 of 6%, and a figure of merit (FoM) of 23.33, surpassing the state-of-the-art (SoA) in its frequency range.
title 2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate
topic Applied Physics
url https://arxiv.org/abs/2405.08139