Residual Stress Development in Lattice Mismatched Epitaxial Thin Films via Atomic and Molecular Layer Depositions

Fuente: arXiv

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Bibliographic Details
Main Authors:	Galib, Musanna, Orhan, Okan K., Liu, Jian, Ponga, Mauricio
Format:	Preprint
Published:	2024
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2405.10384