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Residual Stress Development in Lattice Mismatched Epitaxial Thin Films via Atomic and Molecular Layer Depositions

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Galib, Musanna, Orhan, Okan K., Liu, Jian, Ponga, Mauricio
Natura:	Preprint
Pubblicazione:	2024
Soggetti:	Materials Science
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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