CMOS-Compatible, AlScN-Based Integrated Electro-Optic Modulator
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arXiv
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| Main Authors: | , , , , , |
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| Format: | Preprint |
| Published: |
2024
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| _version_ | 1866916251277721600 |
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| author | Yoshioka, Valerie Jin, Jicheng Zhou, Haiqi Tang, Zichen Olsson III, Roy H. Zhen, Bo |
| author_facet | Yoshioka, Valerie Jin, Jicheng Zhou, Haiqi Tang, Zichen Olsson III, Roy H. Zhen, Bo |
| contents | Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in AlScN-based modulators, demonstrating $V_πL$ around 750 V$\cdot$cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2405_11102 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | CMOS-Compatible, AlScN-Based Integrated Electro-Optic Modulator Yoshioka, Valerie Jin, Jicheng Zhou, Haiqi Tang, Zichen Olsson III, Roy H. Zhen, Bo Optics Applied Physics Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in AlScN-based modulators, demonstrating $V_πL$ around 750 V$\cdot$cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics. |
| title | CMOS-Compatible, AlScN-Based Integrated Electro-Optic Modulator |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2405.11102 |