Cover Image

Can we improve the energy efficiency of EUV lithography?

Fuente: arXiv

Saved in:

Bibliographic Details
Main Author:	Shintake, Tsumoru
Format:	Preprint
Published:	2024
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

High-NA In-Line Projector for EUV Lithography
by: Shintake, Tsumoru
Published: (2025)

Extreme ultraviolet lithography reaches 5 nm resolution
by: Giannopoulos, Iason, et al.
Published: (2024)

Freeform terahertz structures fabricated by multi-photon lithography and metal coating
by: Maier, Pascal, et al.
Published: (2024)

Single-exposure holographic lithography of ultra-high aspect-ratio microstructures
by: Lin, Dajun, et al.
Published: (2026)

High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques
by: Herrero, Analía F., et al.
Published: (2025)

Phase mask fabrication for multi-plane light conversion using grayscale lithography
by: Gurung, Sudip, et al.
Published: (2025)

Lossless photon flux sensing methodology for EUV and Soft X-ray metrology systems
by: Weerdenburg, Sven, et al.
Published: (2024)

Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
by: Tanksalvala, Michael, et al.
Published: (2024)

Power-efficient soliton microcombs
by: Helgason, Óskar B., et al.
Published: (2022)

Retrieval of phase information from low-dose electron microscopy experiments: are we at the limit yet?
by: Ibáñez, Francisco Vega, et al.
Published: (2024)

High-efficiency broadband achromatic metalens in the visible
by: Hou, Liang, et al.
Published: (2024)

High efficiency glass-based VUV metasurfaces
by: Martins, Augusto, et al.
Published: (2024)

Nanoparticle doping as a way to enhance holmium fiber lasers efficiency
by: Kamradek, M., et al.
Published: (2024)

Wavelength-selective thermal nonreciprocity barely improves sky radiative cooling
by: Chen, Zihe, et al.
Published: (2024)

Approaching High-efficiency Spatial Light Modulation with Lossy Phase-change Material
by: Chu, Luoyao, et al.
Published: (2024)

Combinatorial split-ring and spiral meta-resonator for efficient magnon-photon coupling
by: Xiong, Yuzan, et al.
Published: (2024)

Impact of SiO$_2$ nanoparticle morphology on scattering efficiency for random lasers
by: Machado, Yan D. R., et al.
Published: (2023)

A power-efficient integrated lithium niobate electro-optic comb generator
by: Zhang, Ke, et al.
Published: (2022)

Synthetic topological device for advancing elastic energy harvesting
by: Guo, Jiamin, et al.
Published: (2026)

Highly efficient collective coupling between laser diode array and lensed fibre ribbon
by: Chanclou, P, et al.
Published: (2024)

Highly efficient, tunable, electro-optic metasurfaces based on quasi-bound states in the continuum
by: Damgaard-Carstensen, Christopher, et al.
Published: (2024)

Perturbed three-channel waveform synthesizer for efficient isolated attosecond pulse generation and characterization
by: Dong, Dianhong, et al.
Published: (2024)

High efficiency second harmonic generation in transverse orientation patterned gallium phosphide waveguides
by: Lemoine, Antoine, et al.
Published: (2024)

Monolithic lithium niobate photonic chip for efficient terahertz-optic modulation and terahertz generation
by: Zhang, Yiwen, et al.
Published: (2024)

Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining
by: Casamenti, Enrico, et al.
Published: (2021)

Three-dimensional angular deviation and diffraction efficiency of a grating in Littrow-configuration ECDL
by: Chen, Biao, et al.
Published: (2023)

High efficiency, high quality factor active membrane metasurfaces with extended Kerker effect
by: Fan, Junxing, et al.
Published: (2025)

The critical role of substrates in mitigating the power-efficiency trade-off in near-field thermophotovoltaics
by: Nimje, Kartika N., et al.
Published: (2025)

Can 2D materials enable passively $Q$-switched lasers in the nanoscale?
by: Christopoulos, Thomas, et al.
Published: (2025)

High efficiency and compact lithium niobate non-resonant recirculating phase modulator and its applications
by: Wang, Feiyu, et al.
Published: (2025)

High efficiency spin-decoupled modulation using chiral C2-symmetric meta-atoms
by: Chen, Haohan, et al.
Published: (2023)

Highly efficient visible and near-IR photon pair generation with thin-film lithium niobate
by: Harper, Nathan A., et al.
Published: (2023)

High-efficiency silicon LED with ultra-wideband emission from visible to infrared at room temperature
by: Li, Xiaobo, et al.
Published: (2025)

Highly efficient wideband and polarization-insensitive SMF-ARF coupling strategy with low back-reflection
by: Su, Yi, et al.
Published: (2025)

Ultra-directional and high-efficiency $μ$LEDs via gradient index filled micro-Horn collimators
by: Luce, Alexander, et al.
Published: (2024)

Integrated lithium niobate photonic computing circuit based on efficient and high-speed electro-optic conversion
by: Hu, Yaowen, et al.
Published: (2024)

Low-profile Aperiodic Metasurfaces for High-efficiency Achromatic Anomalous Reflection over a Wide Bandwidth
by: Ataloglou, Vasileios G., et al.
Published: (2024)

Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits
by: Jang, Hyeong-Soon, et al.
Published: (2024)

High-efficiency infrared upconversion imaging with nonlinear silicon metasurfaces empowered by quasi-bound states in the continuum
by: Liu, Tingting, et al.
Published: (2025)

Design and analysis of MoTe2-based efficient photonic devices for the solar cell and photodetector applications
by: Rahman, Md. Naeemur, et al.
Published: (2026)