Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon
Fuente:
arXiv
Guardado en:
| Autores principales: | Boukhvalov, D. W., Zatsepin, D. A., Biryukov, D. Yu., Shchapova, Yu. V., Gavrilov, N. V., Zatsepin, A. F. |
|---|---|
| Formato: | Preprint |
| Publicado: |
2024
|
| Materias: | |
| Acceso en línea: | |
| Etiquetas: |
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