Observation and manipulation of charge carrier distribution at the SiO$_2$/Si interface

Fuente: arXiv
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Main Authors: Martins, Maria M., Kumar, Piyush, Bathen, Marianne E., Salman, Zaher, Grossner, Ulrike, Prokscha, Thomas
Format: Preprint
Published: 2024
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_version_ 1866909212263579648
author Martins, Maria M.
Kumar, Piyush
Bathen, Marianne E.
Salman, Zaher
Grossner, Ulrike
Prokscha, Thomas
author_facet Martins, Maria M.
Kumar, Piyush
Bathen, Marianne E.
Salman, Zaher
Grossner, Ulrike
Prokscha, Thomas
contents Using low-energy muons, we map the charge carrier concentration as a function of depth and electric field across the \SiOSi interface up to a depth of \SI{100}{\nano\meter} in Si-based MOS capacitors. The results show that the formation of the anisotropic bond-centered muonium \MuBCz state in Si serves as a direct measure of the local changes in electronic structures. Different band-bending conditions could be distinguished, and the extension of the depletion width was directly extracted using the localized stopping and probing depth of the muons. Furthermore, electron build-up on the Si side of the \SiOO/Si interface, caused by the mirror charge induced by the fixed positive charge in the oxide and the image force effect, was observed. Our work represents a significant extension of the application of the muon spin rotation technique ($μ$SR) and lays the foundation for further research on direct observation of charge carrier density manipulation at technologically important semiconductor device interfaces.
format Preprint
id arxiv_https___arxiv_org_abs_2405_18211
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Observation and manipulation of charge carrier distribution at the SiO$_2$/Si interface
Martins, Maria M.
Kumar, Piyush
Bathen, Marianne E.
Salman, Zaher
Grossner, Ulrike
Prokscha, Thomas
Other Condensed Matter
Applied Physics
Using low-energy muons, we map the charge carrier concentration as a function of depth and electric field across the \SiOSi interface up to a depth of \SI{100}{\nano\meter} in Si-based MOS capacitors. The results show that the formation of the anisotropic bond-centered muonium \MuBCz state in Si serves as a direct measure of the local changes in electronic structures. Different band-bending conditions could be distinguished, and the extension of the depletion width was directly extracted using the localized stopping and probing depth of the muons. Furthermore, electron build-up on the Si side of the \SiOO/Si interface, caused by the mirror charge induced by the fixed positive charge in the oxide and the image force effect, was observed. Our work represents a significant extension of the application of the muon spin rotation technique ($μ$SR) and lays the foundation for further research on direct observation of charge carrier density manipulation at technologically important semiconductor device interfaces.
title Observation and manipulation of charge carrier distribution at the SiO$_2$/Si interface
topic Other Condensed Matter
Applied Physics
url https://arxiv.org/abs/2405.18211